JPH0446350B2 - - Google Patents

Info

Publication number
JPH0446350B2
JPH0446350B2 JP60109578A JP10957885A JPH0446350B2 JP H0446350 B2 JPH0446350 B2 JP H0446350B2 JP 60109578 A JP60109578 A JP 60109578A JP 10957885 A JP10957885 A JP 10957885A JP H0446350 B2 JPH0446350 B2 JP H0446350B2
Authority
JP
Japan
Prior art keywords
cryogenic environment
gas
expander
temperature
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60109578A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61268972A (ja
Inventor
Masaaki Akamatsu
Kazuhiko Asahara
Junji Tsukuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobe Steel Ltd
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Priority to JP60109578A priority Critical patent/JPS61268972A/ja
Publication of JPS61268972A publication Critical patent/JPS61268972A/ja
Publication of JPH0446350B2 publication Critical patent/JPH0446350B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation By Low-Temperature Treatments (AREA)
JP60109578A 1985-05-21 1985-05-21 ヘリウム液化・冷凍装置の運転制御方法 Granted JPS61268972A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60109578A JPS61268972A (ja) 1985-05-21 1985-05-21 ヘリウム液化・冷凍装置の運転制御方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60109578A JPS61268972A (ja) 1985-05-21 1985-05-21 ヘリウム液化・冷凍装置の運転制御方法

Publications (2)

Publication Number Publication Date
JPS61268972A JPS61268972A (ja) 1986-11-28
JPH0446350B2 true JPH0446350B2 (en]) 1992-07-29

Family

ID=14513817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60109578A Granted JPS61268972A (ja) 1985-05-21 1985-05-21 ヘリウム液化・冷凍装置の運転制御方法

Country Status (1)

Country Link
JP (1) JPS61268972A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0627617B2 (ja) * 1989-04-18 1994-04-13 岩谷産業株式会社 半導体センサー冷却用液体窒素の貯蔵槽での液体窒素蒸発防止装置
JP6591183B2 (ja) * 2015-03-20 2019-10-16 川崎重工業株式会社 原料ガス液化装置及び原料ガス液化量補正制御方法
JP6368973B2 (ja) * 2015-07-22 2018-08-08 大陽日酸株式会社 循環式ヘリウム再凝縮装置、及び循環式ヘリウム再凝縮方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59134479A (ja) * 1983-01-20 1984-08-02 株式会社神戸製鋼所 ヘリウム液化・冷凍装置
JPH0247674B2 (ja) * 1983-09-13 1990-10-22 Kagaku Gijutsucho Heriumuekika*reitosochi

Also Published As

Publication number Publication date
JPS61268972A (ja) 1986-11-28

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